 Onto Innovation IncONTO | --7.2k shares | Grant / ExerciseMar 2, 2026 | Disclosure amount unavailable7.2k shares | -- | -- |
| Onto Innovation IncONTO | --183k shares | Grant / ExerciseMar 2, 2026 | Disclosure amount unavailable14.5k shares | -- | -- |
| Onto Innovation IncONTO | $37M170.4k shares | Grant / ExerciseMar 1, 2026 | $479.7K2.2k shares | $215.89 | -- |
| Onto Innovation IncONTO | $36M168.5k shares | Grant / ExerciseMar 1, 2026 | $415.6K1.9k shares | $215.89 | -- |
| Onto Innovation IncONTO | --6k shares | Grant / ExerciseMar 1, 2026 | Disclosure amount unavailable6k shares | -- | -- |
| Onto Innovation IncONTO | --172.7k shares | Grant / ExerciseMar 1, 2026 | Disclosure amount unavailable4.6k shares | -- | -- |
| Onto Innovation IncONTO | $37M171.7k shares | Grant / ExerciseFeb 14, 2026 | $1.9M8.9k shares | $217.23 | -- |
| Onto Innovation IncONTO | $37M168.1k shares | Grant / ExerciseFeb 14, 2026 | $789.0K3.6k shares | $217.23 | -- |
| Onto Innovation IncONTO | --11.8k shares | Grant / ExerciseFeb 14, 2026 | Disclosure amount unavailable11.8k shares | -- | -- |
| Onto Innovation IncONTO | --180.6k shares | Grant / ExerciseFeb 14, 2026 | Disclosure amount unavailable18.4k shares | -- | -- |
| Onto Innovation IncONTO | --162.2k shares | Grant / ExerciseDec 24, 2025 | Disclosure amount unavailable25k shares | -- | -- |
| Onto Innovation IncONTO | --11.6k shares | Grant / ExerciseMar 3, 2025 | Disclosure amount unavailable11.6k shares | -- | -- |
| Onto Innovation IncONTO | --187.2k shares | Grant / ExerciseMar 3, 2025 | Disclosure amount unavailable23.2k shares | -- | -- |
| Onto Innovation IncONTO | $24M163.9k shares | Grant / ExerciseMar 1, 2025 | $280.4K1.9k shares | $145.66 | -- |
| Onto Innovation IncONTO | $30M169.7k shares | Grant / ExerciseFeb 14, 2025 | $2.0M11.4k shares | $176.55 | -- |
| Onto Innovation IncONTO | $29M165.9k shares | Grant / ExerciseFeb 14, 2025 | $673.0K3.8k shares | $176.55 | -- |
| Onto Innovation IncONTO | --11.8k shares | Grant / ExerciseFeb 14, 2025 | Disclosure amount unavailable11.8k shares | -- | -- |
| Onto Innovation IncONTO | --181.1k shares | Grant / ExerciseFeb 14, 2025 | Disclosure amount unavailable23.7k shares | -- | -- |
| Onto Innovation IncONTO | $29M157.5k shares | Grant / ExerciseFeb 10, 2025 | $1.7M9.2k shares | $183.28 | -- |
| Onto Innovation IncONTO | $27M147.6k shares | Grant / ExerciseFeb 10, 2025 | $524.0K2.9k shares | $183.28 | -- |
| Onto Innovation IncONTO | --9.5k shares | Grant / ExerciseFeb 10, 2025 | Disclosure amount unavailable9.5k shares | -- | -- |
| Onto Innovation IncONTO | --166.7k shares | Grant / ExerciseFeb 10, 2025 | Disclosure amount unavailable19k shares | -- | -- |
| Onto Innovation IncONTO | $33M150.5k shares | SellJan 21, 2025 | $7.7M35k shares | $219.19 | -- |
| Onto Innovation IncONTO | $39M185.6k shares | SellJan 16, 2025 | $6.3M29.9k shares | $211.24 | -- |
| Onto Innovation IncONTO | $39M185.5k shares | SellJan 16, 2025 | $21.2K100 shares | $212.11 | -- |
| Onto Innovation IncONTO | $43M217.2k shares | SellJan 14, 2025 | $3.7M18.3k shares | $200.09 | -- |
| Onto Innovation IncONTO | $43M215.5k shares | SellJan 14, 2025 | $348.6K1.7k shares | $201.26 | -- |